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PsD-DRT-12-0095

Published on 7 December 2023
PsD-DRT-12-0095
Research FieldElectronics and microelectronics - Optoelectronics

Domaine-S

ThemeEngineering sciences

Theme-S

Domaine
Electronics and microelectronics - Optoelectronics Engineering sciences DRT DOPT SLIR LIB Grenoble
Title
Study and evaluation of a micro resonator based thermal sensor for uncooled infrared imagery
Abstract
The project aims at establishing the feasibility of a novel infrared microbolometer sensor exploiting the thermal sensitivity of a free oscillating micro-nano-mechanical system (M & NEMS), whose resonant frequency changes with the infrared flux it absorbs. This is a concept out who was the subject of three patents. The project addresses the needs of high resolution uncooled infrared imaging sensors (spectral band ranging from 8µm to 12µm) which is presently in expansion but whose next generation of products is still waiting for a breakthrough to reduce the pixel size, a key factor to improve performance and reduce the cost. The objective of this post doctoral study is to achieve a proof of concept of this new architecture. In this outlook, the study will cover first the sizing of the device, then its design, implementation and validation at a single pixel level.
Location
Département d’Optronique (LETI) Service des composants pour l’Imagerie (SLIR) Laboratoire Imagerie Bolométrique (LIB)
Pcontact
YON Jean-Jacques CEA DRT/DOPT//LI2T CEA/Grenoble 17, Rue des Martyrs 38054 Grenoble Cedex 9 0438784150
Start date1/6/2012
Contact personjyon@cea.fr

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