Monolithic integration of hybrid III-V/Si lasers and Si-based modulators for data transmission up to 25Gbps
| Auteurs | Ferrotti T., Blampey B., Jany C., Duprez H., Chantre A., Boeuf F., Seassal C., Ben Bakir B. |
| Year | 2017-0046 |
| Source-Title | Proceedings of SPIE - The International Society for Optical Engineering |
| Affiliations | Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble, Grenoble, France, STMicroelectronics, 850 rue Jean Monnet, Crolles, France, Université de Lyon, Ecole Centrale de Lyon, CNRS, Institut des Nanotechnologies de Lyon-INL, UMR 5270, Ecully, France |
| Abstract | In this paper, the 200mm silicon-on-insulator (SOI) platform is used to demonstrate the monolithic co-integration of hybrid III-V/silicon Distributed Bragg Reflector (DBR) tunable lasers and silicon Mach-Zehnder modulator (MZMs), to achieve fully integrated hybrid transmitters for silicon photonics. The design of each active component, as well as the fabrication process steps of the whole architecture are described in details. Data transmission rate up to 25Gb/s has been reached for transmitters using MZMs with active lengths of 2mm and 4mm. Extinction ratios of respectively 2.9dB and 4.7dB are obtained by applying drive voltages of 2.5V peak-to-peak on the MZMs. 25Gb/s data transmission is demonstrated at 1303.5nm and 1315.8nm, with the possibility to tune the operating wavelength by up to 8.5nm in each case, by using metallic heaters above the lasers Bragg reflectors. © 2017 SPIE. |
| Author-Keywords | Integrated optoelectronics devices, Photonic integrated circuits, Semiconductor lasers, Travelling-wave devices, Waveguide modulators |
| Index-Keywords | Bragg reflectors, Data communication systems, Data transfer, DBR lasers, Digital storage, Integrated optics, Integrated optoelectronics, Modulators, Monolithic integrated circuits, Optical waveguides, Photonic devices, Photonics, Reflection, Semiconductor devices, Semiconductor lasers, Silicon on insulator technology, Transmitters, Data transmission rates, Mach Zehnder modulator, Monolithic integration, Operating wavelength, Photonic integrated circuits, Silicon-on- insulators (SOI), Travelling wave devices, Waveguide modulator, Light modulators |
| ISSN | 0277786X |
| Lien vers article | Link |