BaroSense
Miniaturized, low-power, high-resolution silicon barometric sensor
This miniaturized, low-power barometric sensor (< 2 mm2) is manufactured using silicon technology. Designed to operate in pressure environments ranging from one bar to several thousand bars, it is extremely sensitive and measures differences in altitude at a one centimeter level of precision. It is the only such device on the market with a self-test function that guarantees the reliability of its measurements.
The external pressure is calculated by measuring the deformation of a membrane that seals a vacuum chamber. Mechanical limits protect this membrane from breaking in case of excessive pressure. The sensor will work at temperatures up to 150°C..
What's new?
- Very high performance in terms of accuracy and resolution: altitude change detected at the one-centimeter level, which can be used in particular to detect if a person falls (using a very low frequency, ultra-low consumption method).
- The only barometric sensor on the market with a self-test function (using a decoupled capacitor system).
- An extended pressure range, from one bar to several thousand bars, that is easily adaptable according to your needs.
- Compatible with high temperatures.
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What's next?
- Added-value projects currently underway with industrial partners: sensor
customization for a pressure range; co-integration with an accelerometer.
- Proof of concept can be carried out for a set of sensors created in CEA-Leti
clean rooms with production and yield estimates as well.
- This technology can be re-used to develop high performance differential
sensors (e.g. for measuring flow rate).
- Development can be achieved in 12 to 18 months.
- Co-integration is possible with several accelerometers on a single
silicon component.
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