grazing incident x-ray fluorescence combined with x-ray reflectometry metrology protocol of telluride-based films using in-lab and synchrotron instruments
| Description | |
| Date | 2018 |
| Date | |
| Auteurs | Pessoa,- W | Roule,- A | Nolot,- E | Mazel,- Y | Bernard,- M | Lépy,- M-c | Ménesguen,- Y | Novikova,- A | Gergaud,- P | Brigidi,- F | Eichert,- D | |
| Source | Spectrochimica Acta - Part B Atomic Spectroscopy Volume 149 (pp 143-149) |
| Résumé | Telluride films are widely applied in data storage devices (advanced resistive memories, DVDs and Blue-rays disks), photovoltaic cells and infrared detectors. The properties of thin telluride alloys are deeply influenced by their chemical composition and compositional depth profile, whereas surface/interface effects may become preponderant in ultrathin films. The combination of X-ray reflectometry (XRR) and grazing-incidence X-ray fluorescence (GIXRF) is particularly adequate to probe these complex thin layered materials. In this paper, we evaluate the performances of Lab-based and synchrotron-based XRR/GIXRF strategies to characterize ultrathin ( |
| DOI | http://dx.doi.org/10.1016/j.sab.2018.07.003 |
| Type de documents | |
| Impact Factor | |