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Influence of source-drain engineering and temperature on split-capacitance characteristics of FDSOI p-i-n gated diodes

Publié le 29 mars 2018
Influence of source-drain engineering and temperature on split-capacitance characteristics of FDSOI p-i-n gated diodes
Auteurs
Sasaki K.R.A., Navarro C., Bawedin M., Andrieu F., Martino J.A., Cristoloveanu S.
Year2017-0089
Source-Title2016 SOI-3D-Subthreshold Microelectronics Technology Unified Conference, S3S 2016
Affiliations
LSI, PSI, USP, University of Sao Paulo, Sao Paulo, Brazil, IMEP, LAHC, Grenoble, France, CEA, LETI, Grenoble, France
Abstract
Motivated by the TFET (tunneling field effect transistor) technology, we investigate the temperature and gate overlap/underlap influence on the capacitance of p-i-n diodes fabricated with UTBB FDSOI. The underlap-overlap architecture modifies the split capacitance curves essentially when the back interface is depleted. As a result, the extracted front gate oxide (tOX) and silicon film thickness (tSi) are accurate, with error below 5%. At high temperature, the capacitance curves are narrower due to the threshold voltage (VT) lowering in n- and p-channels. However, the accuracy of tOX and tSi extraction is only marginally affected. © 2016 IEEE.
Author-Keywords
 
Index-Keywords
Field effect transistors, Microelectronics, Threshold voltage, Capacitance characteristics, Gate overlap, Gate oxide, Gated diodes, High temperature, Silicon film thickness, Source-drain, Tunneling field-effect transistors, Capacitance
ISSN 
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