Vous êtes ici : Accueil > CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

Publications

CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL

Publié le 29 mars 2018
CASTOR, a new instrument for combined XRR-GIXRF analysis at SOLEIL
Auteurs
Ménesguen Y., Boyer B., Rotella H., Lubeck J., Weser J., Beckhoff B., Grötzsch D., Kanngießer B., Novikova A., Nolot E., Lépy M.-C.
Year2017-0425
Source-TitleX-Ray Spectrometry
Affiliations
CEA, LIST, Laboratoire National Henri Becquerel (LNE-LNHB), Gif-sur-Yvette cedex, France, Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, Berlin, Germany, Institut für Optik und Atomare Physik, Technische Universität Berlin, Hardenbergstr. 36, Berlin, Germany, CEA, LETI, MINATEC, 17 rue des Martyrs, Grenoble cedex 9, France
Abstract
A new instrument called CASTOR is operated at the SOLEIL synchrotron facility and is dedicated to the characterization of thin films with thicknesses in the nanometer range. The instrument can combine X-ray reflectivity measurements with fluorescence (XRF) acquisitions and especially total reflection X-ray fluorescence-related techniques such as grazing incidence XRF. The instrument was successfully installed and operated on the two branches of the metrology beamline making possible experiments over a wide range of photon energies (45 eV to 40 keV). A heating sample holder was developed to allow the sample temperature to be controlled up to 300° C. Some examples of the first studies are given to illustrate the capabilities of the setup. Copyright © 2017 John Wiley & Sons, Ltd. Copyright © 2017 John Wiley & Sons, Ltd.
Author-Keywords
 
Index-Keywords
 
ISSN498246
Lien vers articleLink

Go back to list