Vous êtes ici : Accueil > Phase formation sequence in the Ti/InP system during thin film solid-state reactions

Publications

Phase formation sequence in the Ti/InP system during thin film solid-state reactions

Publié le 29 mars 2018
Phase formation sequence in the Ti/InP system during thin film solid-state reactions
Auteurs
Ghegin E., Rodriguez Ph., Lábár J.L., Menyhárd M., Favier S., Sagnes I., Nemouchi F.
Year2017-0304
Source-TitleJournal of Applied Physics
Affiliations
STMicroelectronics, 850 rue Jean Monnet, BP 16, Crolles, France, Univ. Grenoble Alpes, Grenoble, France, CEA, LETI, MINATEC Campus, Grenoble, France, CNRS-C2N, Route de Nozay, Marcoussis, France, MTA EK MFA, Konkoly Thege M. u. 29-33, Budapest, Hungary, Centre de Nanosciences et de Nanotechnologies, CNRS, Univ. Paris-Sud, Université Paris-Saclay, C2N-Marcoussis, Marcoussis, France
Abstract
The metallurgical properties of the Ti/InP system meet a great interest for its use as a contact in the scope of various applications such as the Si Photonics. The investigations conducted on this system highlight the initiation of a reaction between the Ti and the InP substrate during the deposition process conducted at 100 °C. The simultaneous formation of two binary phases, namely, Ti2In5 and TiP, is attributed to the compositional gradient induced in the InP by the wet surface preparation and enhanced by the subsequent in situ Ar+ preclean. Once formed, the TiP layer acts as a diffusion barrier inhibiting further reaction up to 450 °C in spite of the presence of an important Ti reservoir. At higher temperature, however, i.e., from 550 °C, the reaction is enabled either by the enhancement of the species diffusion through the TiP layer or by its agglomeration. This reaction gives rise to the total consumption of the Ti2In5 and Ti while the TiP and In phases are promoted. © 2017 Author(s).
Author-Keywords
 
Index-Keywords
Binary alloys, Indium alloys, Photonics, Solid state reactions, Binary phasis, Compositional gradients, Deposition process, InP substrates, Metallurgical properties, Phase formation sequence, Simultaneous formation, Species diffusion, Titanium alloys
ISSN218979
Lien vers articleLink

Retour à la liste