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Detection of N-Te bonds in the as-deposited amorphous nitrogen-doped GeTe-based phase change alloys using N K-edge XANES spectroscopy and their impact on crystallization

Publié le 29 mars 2018
Detection of N-Te bonds in the as-deposited amorphous nitrogen-doped GeTe-based phase change alloys using N K-edge XANES spectroscopy and their impact on crystallization
Auteurs
Krbal M., Kolobov A.V., Fons P., Mitrofanov K.V., Tamenori Y., Hyot B., Andre B., Tominaga J.
Year2017-0022
Source-TitleJournal of Alloys and Compounds
Affiliations
Faculty of Chemical Technology, Center of Materials and Nanotechnologies (CEMNAT), University of Pardubice, Legions Square 565, Pardubice, Czech Republic, Nanoelectronics Research Institute, National Institute of Advanced Industrial Science and Technology, 1-1-1 Higashi, Tsukuba, Ibaraki, Japan, Japan Synchrotron Radiation Research Institute (JASRI), SPring-8, Mikazuki, Hyogo, Japan, Laboratoire de Technologies pour la Nanophotonique, DOPT, SIONA, CEA Leti-MINATEC, 17 rue des martyrs, Grenoble, France
Abstract
Using N K-edge XANES studies, we demonstrate a noticeable difference in local structure around the nitrogen atoms in as-deposited amorphous and annealed N-doped GeTe-based phase change alloys. The pronounced changes appear as a ? 2 eV shift in the absorption edge to higher photon energies and the overall shape of the XANES spectrum. Comparison of the experimental XANES spectrum of the as-deposited amorphous phase with ab-initio XANES simulations discloses that the as-deposited phase mainly consists of the NGe3and the NTe3pyramidal units in approximately equal concentration. When annealed, NTe3units gradually rebond to the NGe3units and at the same time N atoms diffuse through the amorphous phase to form the GexNyaggregates. Upon long-standing annealing at 400?C a compact interlayer of Ge3N4is formed in the crystalline phase. © 2017 Elsevier B.V.
Author-Keywords
Local structure, Phase-change memory, X-ray absorption spectroscopy
Index-Keywords
Amorphous alloys, Annealing, Doping (additives), Germanium, Nitrogen, X ray absorption near edge structure spectroscopy, X ray absorption spectroscopy, Absorption edges, Amorphous phase, Crystalline phase, Local structure, Nitrogen atom, Nitrogen-doped, Photon energy, XANES spectra, Phase change memory
ISSN9258388
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