2D MEMS Micro-Mirror
A scene scanner that can withstand high incident laser intensities for longer ranges
CEA-Leti’s MEMS micro-mirror consists of a reflector and four piezoelectric actuators that pivot the reflector on two axes, allowing it to effectively scan a scene.
The reflector can be coated either with gold or with a Bragg surface. The Bragg reflector can withstand high incident laser intensities for longer scanning ranges. The piezoelectric actuators that pivot the mirror are compact, and the electronics simple.
The device operates in a quasi-static (non-resonant) mode, providing additional flexibility to adapt the scanning frequency to different use cases and allowing a fixed mirror position. The entire device is around the size of a coin.
What it can do
CEA-Leti’s MEMS micro-mirrors are suitable for anyapplications that require the ability to direct a beam of light with a high degree of precision and/or at long ranges: -
Automotive LiDAR, which demands robustness to high incident laser intensity
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Military applications that require the ability to scan scenes or focus light at long ranges
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Visible light applications like self-adjusting headlights that automatically scan the environment and adapt the beam
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Near-space optical communications, which require precision control of the beam
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Biomedical applications like endoscopes are also possible with biocompatible lead-free actuators instead of PZT actuators
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What makes it unique
CEA-Leti's MEMS micro-mirror pivots on two axes for 2D scanning. And, with its unique Bragg reflector, the device can withstand up to 2 W incident laser intensity at 1.55 μm, which meets the requirements of long-range LiDAR. This is much higher than commercially-available micro-mirrors, enabling these longer ranges. The PZT piezo actuators are particularly compact, low-voltage (around 20 V), and low-power. The quasi-static mode enables a variety of scanning frequencies for greater flexibility while allowing a large area to be scanned at long ranges. The devices are fabricated collectively on 200 mm SOI wafers using standard VLSI processes, reducing costs, and contain no bulky, heavy magnets.
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Credits: L.MOLLARD/CEA
Working with CEA-Leti
CEA-Leti’s MEMS micro-mirrors are ideal for automotive and military equipment manufacturers and free-space optical communications satellite manufacturers. A proof-of-concept was tested successfully as part of the EU VIZTA* project, and the technology is now ready to be scaled up for a specific use case with a partner.
Companies of all types and sizes can work with CEA-Leti to develop 2D scanning solutions with these high-performance MEMS micro-mirrors.
*VIZTA: Vision, Identification, with Z-sensing Technologies, cordis.europa.eu/project/id/826600