Lead-Free Piezoelectric Materials
Innovative materials and processes to transition piezoelectric devices to tomorrow’s lead-free world
The European RoHS Directive now outlaws lead in all new electronics released on the market. PZT, a common piezoelectric material containing lead, is exempt, but the clock is ticking. CEA-Leti possesses deep knowledge of two lead-free piezoelectric materials: KNN (potassium sodium niobate) and AlScN (aluminum scandium nitride). CEA-Leti’s expertise covers the entire value chain, from selecting the appropriate material and fine-tuning dopant concentrations for specific applications to integrating the materials into devices, accelerating the transition to lead-free electronics.
What it can do
CEA-Leti can integrate lead-free materials into a variety of devices: - Piezoelectric MEMS micro-speakers and microphones,
- Piezoelectric micromachined ultrasonic transducers (PMUTs) for consumer, automotive, and medical sensors,
- MEMS for optical devices like lenses and micro-mirrors.
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What makes it unique
CEA-Leti's in-depth knowledge of these lead-free piezoelectric materials, combined with industrial-scale fabrication processes, is unique. CEA-Leti’s piezoMEMS processes are compatible with 200 mm VLSI technologies for direct transfer to commercial fabs. 200 mm KNN wafers from Sumitomo Chemical can be fully processed in-house in CEA-Leti cleanrooms. CEA-Leti is currently optimizing its in-house AlScN deposition process and will soon possess its own KNN deposition capabilities, broadening the range of devices that can be fabricated at CEA-Leti.
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Credits: CEA
Working with CEA-Leti
CEA-Leti has a strong track record transferring PZT processes to major foundries. These same capabilities are now available for lead-free piezoelectric materials. Semiconductor foundries, fabless companies, semiconductor process equipment manufacturers, and tech companies can turn to CEA-Leti to develop the next generation of lead-free devices for their own products and their integrator customers. CEA-Leti is accustomed to working with third-party KNN suppliers and is prepared to scale-up lead-free-material deposition processes to meet new partners’ specific needs.
Scientific publicationss
Kuentz, H., et al. (2024).
“KNN lead-free technology on 200 mm Si wafer for piezoelectric actuator applications.” Sensors and Actuators A. Physical, 372, 115370.
Mollard, L., et al. (2025). “Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance.”
J. Sens. Sens. Syst., 14, 27–35.
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