MEMS
Microsensors and microactuators manufactured with microelectronic based technologies
What are MEMS? MEMS = Micro Electro Mechanical Systems. CEA-Leti, as one of the world’s pioneers in MEMS technologies, is constantly pushing the limits of MEMS expertise to stay a step ahead in technology know-how. Today, CEA-Leti offers you extensive capabilities in developing ultrasensitive, multifunctional and robust MEMS & NEMS, designed for integration into your specific products and application fields.
What it can do
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Consumer: smartphones, tablets, watches etc.
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Automotive: airbags, navigation systems, etc.
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Aerospace: RF switches, etc.
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Industry: process monitoring (pressure, flow, etc.)
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Defense: artillery systems, security triggers
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Medical: blood pressure monitoring, analyses methods
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What makes it unique
- The combination of MEMS and nanoscale technology in
generic M&NEMS platform.
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Miniaturization of many types of sensors (ultrasonic transducers, pressure sensors, microphones, etc.) and various transduction modes available (capacitive, piezoresistive, piezoelectric, magnetic, etc.).
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Piezoelectric actuators integration with large spectrum of piezoelectric materials (AlN, PZT, doped PZT, etc. with thickness from 200 nm to 2 μm).
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Lead-free piezoelectric materials: innovative materials and processes to drive the evolution of piezoelectric devices towards future technologies.
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Optomechanical sensors high-efficiency motion detection for extreme sensitivity, ultra-rapid response, and superior integrability.
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Haptic actuators using differentiating & innovating piezoelectric technologies (thin-film, flexible patches, transparent). Microphones offering state of the art global features: very large dynamic (no saturation) and very high sensitivity (low SNR—crystal clear)
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MEMS packaging on wafer level: wafer bonding, thin film packaging, TSV, RDL, etc.
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What's next?
- Improvement of piezoelectric and magnetic materials stacks:
push beyond existing limits
- Combination of silicon photonic and nano-scale sensing (optomechanical sensors) : improved resolution for high performance sensors (AFM, mass spectrometry, biosensing, and oscillators/clocks, etc.)
- Introduction of new materials (2D materials—graphene, MoS2, etc.): explore the high potential to make new sensors (bio-sensors, ultrasonic transducers, etc.)
- Pioneering the future of touch: conformable and flexible haptic interfaces.