EVENT
Discover CEA-Leti’s latest results in Microphone MEMS and Optomechanical Sensing
The field of Microelectromechanical Systems (MEMS) has evolved significantly since the 1980s, transitioning from simple capacitive sensors to highly sensitive piezoresistive sensors. This presentation will outline the development roadmap for MEMS, emphasizing innovative materials and sensing technologies that are driving next-generation devices, particularly in microphone MEMS and optomechanical sensing.
COME AND MEET CEA-LETI'S EXPERTS
This year, CEA-Leti’s booth will exhibit optomechanical sensor demo. Come and discuss lastest achievements in terms of microsystems.
Booth Table top
Optomechanical sensor
Mechanical sensing through light for extreme sensitivity, ultra-rapid response, and superior integrability
CEA-Leti’s optomechanical sensors represent a technological revolution compared to conventional sensors. This new generation of optomechanical sensors developed by CEA-Leti combines silicon photonics and high-performance MEMS.
DISCOVER
CEA-LETI’S MAJOR SCIENTIFIC RESULTS
With 2 papers, the institute will present this year’s major scientific results at Hilton Head, including the following topics:
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Optomechanical sensor
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MEMS characterization
Poster Presentations - Session 2
June 3, 2026 - 2:30 PM
Session 2
WP-25
Hemant Kumar Verma
High Dynamic Range And Q-Factor Ghz Optomechancial Resonators For Timing Applications
June 3, 2026 - 2:30 PM
Session 2
WP-37
Hélène Duchemin
Characterization Of Integrated Vacuum For High Performance Mems Devices
DON'T MISS Pierre-Damien BERGER'S TALK ON Microphone MEMS and Optomechanical Sensing
Session 2: R&D, manufacturing and applications
Thursday, June 4 at 10:45 AM
MEMS no Shinpo: Advancing the Future with Illustrative Applications in Microphone MEMS and Optomechanical Sensing
Pierre-Damien BERGER
MEMS Industrial Partnerships Manager
ABOUT HILTON HEAD
The 22nd in the series of Hilton Head Workshops on the science and technology of solid-state sensors, actuators, and microsystems will take place May 31 to June 4 at the Sonesta Resort on Hilton Head Island, SC.
The Hilton Head Workshop draws 350-500 academic, industry, and government participants from diverse engineering and scientific backgrounds, including chemistry, materials science, chemical engineering, electrical engineering, mechanical engineering, physics, biology, bioengineering, etc. Previous workshops have provided a highly interactive forum for researchers to present and discuss recent advances in microfabrication technologies for sensing and actuation devices and microsystems for physical, chemical, and biological applications.
Celebrating the 40th anniversary of the workshop in 2024, the theme of the workshop was "Celebration of the last 40 years of MEMS & Hilton Head and looking ahead to the next 40 years” which celebrated MEMS successes and explored the potential for MEMS to impact a variety of global issues and grand challenges and hopefully inspired our community while encouraging new collaborations and ideas.
More information on HILTON HEADwebsite