innovation for industry
In collaboration with Vmicro SAS, researchers from the CEA-Leti and the CNRS1,2,3 have developed a probe for an atomic force microscope, using optomechanical interactions for very high speed operation. With a vibrational frequency 100x higher than normal probes and an extreme motion sensitivity, the optomechanical probe paves the way for ultra-rapid AFM measurements. Our approach has been patented and the initial results have been published in the Nanoscale review.
Probe for atomic force microscope equipped with an optomechanical resonator, and atomic force microscope comprising such a probe
B. Legrand, L. Duraffourg, S. Hentz, I. Favero, M. Faucher, B. Walter and P. Allain
Patent No. FR20170050471 and WO2018134377 (A1)
Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces
P.E. Allain, L. Schwab, C. Mismer, M. Gely, E. Mairiaux, M. Hermouet, B. Walter, G. Leo, S. Hentz, M. Faucher, G. Jourdan, B. Legrand and I. Favero
1 Laboratory for the Analysis and Architecture of Systems LAAS, CNRS UPR 8001 (INSIS & INS2I), University of Toulouse
2 Quantic Materials and Phenomena MPQ, CNRS UMR 7162 (INP/INSIS), University of Paris
3 Institute of Electronics, Microelectronics and Nanotechnology IEMN, CNRS UMR 8520 (INSIS/INP), University of Lille
4 Subsidy ANR-14-CE26-0019, project OLYMPIA (2014-2019)
CEA is a French government-funded technological research organisation in four main areas: low-carbon energies, defense and security, information technologies and health technologies. A prominent player in the European Research Area, it is involved in setting up collaborative projects with many partners around the world.