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Materials for Quantum Computing


Towards a European value chain for qubits and quantum computers 

Published on 8 September 2023

Materials for Quantum Computing

Towards a European value chain for qubits and quantum computers




Starting date :
​June 2021 > May 2024

Lifetime :
​36 months​​​​


Program in support :


Status project :
​in progress

CEA-Leti's contact :​ 


Project Coordinator :


  • CEA
  • Interuniversity Microelectronics Centre (IMEC)
  • BE Semiconductor Industries N.V. (Besi)
  • Delft Circuits B.V.
  • Soitec
  • VTT Technical Research Centre of Finland Ltd
  • Siltronic AG
  • Atotech Deutschland GmbH
  • Keysight Technologies GmbH
  • Kiutra GmbH, Technic France
  • intelligent fluids GmbH
  • Orange Quantum Systems Operational B.V.
  • BULL S.A.S.
  • Mellanox Technologies Ltd.

Investment :
​21.7 M€​​​​

Targeted Markets :
​Quantum technologies​

Website :​​

Credit photo :


  • Several approaches to realize qubits exist, yet they still lack stable scalable fabrication value chains to become industrially viable technologies. Superconducting qubits are among the most promising components to realize a large-scale quantum computer. The relatively rapid success of Josephson junction (JJ)-based qubits can be attributed to design principles that are based on well-established production processes. The performance of superconducting JJs, however, depends critically on the quality of the fabrication substrates, the materials used to make the circuit components, as well as the reproducibility of the processes applied in fabrication. A stable and controlled value chain is key to improving these parameters in the future.​


  • ​​The overarching goal of the MATQu project is to build a European ecosystem and infrastructure for the development, production and testing of superconducting qubits. The MATQu project will validate technology options to produce superconducting Josephson junctions on industrial 300 mm silicon-based process flows. The project addresses substrate technology, superconducting metals, resonator technology, through-wafer-via holes, 3D integration, and variability characterization. The substrate-, process- and test-compatibility will be assessed with respect to integration practices for qubits. Core substrate and process technologies with high quality factors, improved material deposition on large substrates, and increased critical temperature for superconducting operation, will be developed and validated. Concerning substrate technology, process technology and tools, the MATQu project brings together major European actors in the field, including four large RTOs. The MATQu partners complement each other in an optimal manner across the value chain to create a substantial competitive advantage, e.g. faster time-to-market and roll-out of technologies and materials for better Josephson junctions for quantum computing.