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Leti shows the way to fabricating CMOS devices for 5-NM node using nanowire technology bricks

SAN FRANCISCO – Dec. 5, 2016 – Leti, an institute of CEA Tech, presented two papers at IEDM
2016 today that demonstrate its ability to provide industry with all the elements required for building
a competitive 5-nm node with nanowire architectures
Published on 5 December 2016

Nanowire architectures are seen as the best candidates for that node, and Leti is addressing some
of its biggest challenges, such as of performance and parasitic capacitances. Its results suggest
that strain can be introduced into stacked nanowire and that parasitic capacitances can be reduced
thanks to inner spacer integration.

The paper, “Vertically Stacked-Nanowires MOSFETs in a Replacement Metal Gate Process with
Inner Spacer and SiGe Source/Drain”, is the first demonstration of functional devices with SiGe
source and drain to induce strain in the channel to boost performance, and inner spacer to reduce
parasitic capacitances. Both building blocks are required for the 5-nm node. This MOSFET
architecture extends the scaling limits of CMOS technology, and is also seen as a possible
extension to FinFET.

Leti, at IEDM 2008, was among the world’s first organizations to report stacked nanowire and
nanosheet results.

The second paper, “NSP: Physical Compact Model for Stacked-planar and Vertical Gate-All-
Around MOSFETs”, presents a predictive and physical compact model for nanowire and nanosheet
gate-all-around MOSFETs.

“This is the first compact model, or SPICE model, that can simulate stacked nanowire and
nanosheet devices with various geometries,” said Olivier Faynot, Leti’s microelectronics section
manager and a co-author of both papers. “It also enables the simulation of vertical nanowire, which
is one of the key achievements of this model.”

The paper presents a physically based SPICE model for stacked nanowires that can enable circuit
designers to accurately project their existing circuits into the 5-nm node, and investigate novel

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