You are here : Home > SL-DRT-24-0538

Theses

SL-DRT-24-0538

Published on 7 December 2023
SL-DRT-24-0538
Research fieldAdvanced nano characterization

Domaine-SElectronics and microelectronics - Optoelectronics

ThemeTechnological challenges

Theme-SEngineering sciences

Field
Advanced nano characterization Technological challenges Electronics and microelectronics - Optoelectronics Engineering sciences DRT DCOS SCCS LCEF Grenoble
Title
Electrical characteization and Reliability of NextGeN FDSOI MOSFETs
Abstract
Global demand on semiconductor solutions (device, circuit, system) has skyrocketed during the last few years, especially in reliation with COVID worldwide crisis. This industry has revealed its significance in the present world has well as its weaknesses. The European council decided to launch an ambisious program called 'Chip Act' to develop a solid semiconductor european industries network based on its champions such as ST microelectronics, SOITEC and the CEA-LETI. In France, the french government decided to push forward the FDSOI technology using the CEA-LETI to develop the 10nm node and beyond. The reach the MOSFET expected performance of such an aggressive node, several original technological solutions are considered, such as the use of Si-channel stressors to boost the mobility and the ON state current or the use of thinned Si channel film and gate oxide. The influence of these novel processes and technological bricks on MOSFET FoM and reliability must be carefully studied before entering in a production mode. The PhD student will address the electrical characterization of the High-k/Metal Gate stacks (initial performance) and their long term reliability (aging under stress). Electrical modeling of the experimental data will be used to determine the crucial parameters to improve and give quick feedback to the Device development Lab.
Formation
Master 2 / Ecole ingénieur Technological Research
Contact person
VANDENDAELE William CEA DRT/DCOS/SCCS/LCEF CEA LETI DCOS/SMCE/LCTE 17 avenue des Martyrs 38054 Grenoble Cedex 0630924002 william.vandendaele@cea.fr
University/ graduate school
Université Grenoble Alpes Electronique, Electrotechnique, Automatique, Traitement du Signal (EEATS)
Thesis supervisor
DRT/DCOS/S3C/LTA
Location
Département Composants Silicium (LETI) Service Caractérisation, Conception et Simulation Laboratoire Caractérisation Electrique et Fiabilité
Start1/2/2024

Retour à la liste