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Published on 8 March 2024


Miniaturized, low-power, reliable, high-resolution silicon barometric sensor​​

This miniaturized, low-power barometric sensor (< 2 mm2) is manufactured using silicon technology. Designed to operate in pressure environments ranging from one bar to several thousand bars, it is extremely sensitive and can measure differences in altitude to within a centimeter. It is the only device of its kind on the market with a self-test function that guarantees the reliability of its measurements.

External pressure is calculated by measuring the deformation of a membrane that seals a vacuum chamber. A mechanical safeguard protects the membrane from rupturing due to excessive pressure. The sensor can operate at temperatures up to 150 °C.

What's new?

  • Very high performance in terms of accuracy and resolution: altitude changes can be detected to within a centimeter, opening the door to human fall detection using a very-low-frequency, ultra-low-power method.​
  • It is the only barometric sensor on the market with a self-test function (a decoupled capacitor system) to guarantee accuracy.​
  • An extended pressure range, from one bar to several thousand bars, that is easily adaptable to a variety of use cases.​
  • Can withstand high temperatures.
  • ​Co-integration is possible with several accelerometers on a single silicon component.​

What's next?
  • Customization for a specific pressure range and co-integration with an accelerometer currently in progress for our R&D partners​.
  • Proof of concept of custom developments and integrations (with production and yield estimates) can be completed in CEA-Leti clean rooms​.
  • This technology can be re-used to develop high performance differential sensors (e.g. for flow rate measurement)​.
  • New developments can be completed in 12 to 18 months.

BaroSense: a revolution in barometric pressure sensor




The applications for this sensor span a wide range of industries:

  • Automobile: tire pressure control, airbag, engine control
  • Aeronautics: tire pressure control, engine combustion regulation in relation to altitude
  • Medical: fall detector 
  • Consumer markets: 3D indoor navigation, altimeter, onboard barometer 
  • Oil exploration and extraction:  Production, storage and distribution of industrial gases
  • ​Monitoring of all types of industrial processes that require precise pressure measurements

Key figures

  • ​​​​​Miniaturized (< 2 mm²) low-power barometric sensor
  • Very high performance in terms of resolution (0,3 Pascal) ​accurate to within a centimeter
  • Embedded self-test function​​​​​

in this technology?



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