BaroSense
Miniaturized, low-power, reliable, high-resolution silicon barometric sensor
This miniaturized, low-power barometric sensor (< 2 mm2) is manufactured using silicon technology. Designed to operate in pressure environments ranging from one bar to several thousand bars, it is extremely sensitive and can measure differences in altitude to within a centimeter. It is the only device of its kind on the market with a self-test function that guarantees the reliability of its measurements.
External pressure is calculated by measuring the deformation of a membrane that seals a vacuum chamber. A mechanical safeguard protects the membrane from rupturing due to excessive pressure. The sensor can operate at temperatures up to 150 °C.
What's new?
- Very high performance in terms of accuracy and resolution: altitude changes can be detected to within a centimeter, opening the door to human fall detection using a very-low-frequency, ultra-low-power method.
- It is the only barometric sensor on the market with a self-test function (a decoupled capacitor system) to guarantee accuracy.
- An extended pressure range, from one bar to several thousand bars, that is easily adaptable to a variety of use cases.
- Can withstand high temperatures.
- Co-integration is possible with several accelerometers on a single silicon component.
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What's next?
- Customization for a specific pressure range and co-integration with an accelerometer currently in progress for our R&D partners.
- Proof of concept of custom developments and integrations (with production and yield estimates) can be completed in CEA-Leti clean rooms.
- This technology can be re-used to develop high performance differential sensors (e.g. for flow rate measurement).
- New developments can be completed in 12 to 18 months.
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BaroSense: a revolution in barometric pressure sensor